Design: Clean Rooms - index
Design: Clean Rooms - ufc_4_310_02n0001
Unified Facilities Criteria (UFC) - ufc_4_310_02n0002
Foreword - ufc_4_310_02n0003
Contents - ufc_4_310_02n0004
Chapter 1 Introduction - ufc_4_310_02n0005
Appendix A - ufc_4_310_02n0006
Military Handbook Environmental Control - Design of Clean Rooms
Abstract - ufc_4_310_02n0008
Foreword - ufc_4_310_02n0009
Maintenance Facilities Criteria Manuals - ufc_4_310_02n0010
Contents - ufc_4_310_02n0011
Contents - Cont'd - ufc_4_310_02n0012
Contents - Cont'd - ufc_4_310_02n0013
Tables - ufc_4_310_02n0014
Section 1: Introduction - ufc_4_310_02n0015
Section 2: Energy Conservation
Coils
Duty Cycle
Figure 1 Primary Airstream Using a Dry Coil
Figure 2 Outdoor Air Transfer Coil With Dry Coils
Figure 3 Dry Coil Piping
Figure 4 Primary Airstream With Bypass Air
Section 3: Planning and Design Criteria
Structural Framing
Floor Finishes - ufc_4_310_02n0025
Ceiling Finishes
Central Vacuum Cleaning System
Vibration Isolation
Cleaning Requirements During Construction
Equipments Air Locks
Figure 5 Air Shower Velocity Versus Personnel Time in Shower
Color Treatment
Mechanical Systems - ufc_4_310_02n0033
Filter Installation
High Vacuum
Central Vacuum Cleaning Systems
Control Valves
Section 4: Acceptance Tests and Contamination Curves
Particle Size Distribution Curves
Figure 6 Particle Size Distribution Curves
Figure 7 Cleanliness Requirements Versus Particle Size Distribution Curves
Figure 8 Typical Particle Size
Table 1. Guidelines for Clean Room Classes
Section 5. Clean Room Designs
Advantages - ufc_4_310_02n0045
Downflow Clean rooms (Vertical Laminar Flow)
Figure 9 Plan View of a Conventional Clean Room Area With Clean Work Stations
Figure 10 Horizontal Laminar Airflow Paths
Figure 11 Vertical Laminar Airflow Paths
Figure 12 Vertical Flow Room With Basement
Figure 13 Vertical Flow Ceiling Unit
Figure 14 Vertical Laminar Flow
Design - ufc_4_310_02n0053
Specifications - ufc_4_310_02n0054
Design Requirements - ufc_4_310_02n0055
Upgrading of Existing Clean Rooms
Clean Work Stations
Tunnel Units
Figure 15 Built-in Clean Work Station
Figure 16 Horizontal Laminar Flow Bench
Figure 17 Vertical Laminar flow Bench
Figure 18 Laminar Flow Exhaust Hood
Figure 19 Movable Laminar Flow Clean Booth
Figure 20 Filter Bank Module
Bibliography - ufc_4_310_02n0065
References - ufc_4_310_02n0066
References - Cont'd - ufc_4_310_02n0067
References - Cont'd - ufc_4_310_02n0068
Glossary - ufc_4_310_02n0069
Glossary - Cont'd - ufc_4_310_02n0070
Design: Clean Rooms - ufc_4_310_02n0001
Unified Facilities Criteria (UFC) - ufc_4_310_02n0002
Foreword - ufc_4_310_02n0003
Contents - ufc_4_310_02n0004
Chapter 1 Introduction - ufc_4_310_02n0005
Appendix A - ufc_4_310_02n0006
Military Handbook Environmental Control - Design of Clean Rooms
Abstract - ufc_4_310_02n0008
Foreword - ufc_4_310_02n0009
Maintenance Facilities Criteria Manuals - ufc_4_310_02n0010
Contents - ufc_4_310_02n0011
Contents - Cont'd - ufc_4_310_02n0012
Contents - Cont'd - ufc_4_310_02n0013
Tables - ufc_4_310_02n0014
Section 1: Introduction - ufc_4_310_02n0015
Section 2: Energy Conservation
Coils
Duty Cycle
Figure 1 Primary Airstream Using a Dry Coil
Figure 2 Outdoor Air Transfer Coil With Dry Coils
Figure 3 Dry Coil Piping
Figure 4 Primary Airstream With Bypass Air
Section 3: Planning and Design Criteria
Structural Framing
Floor Finishes - ufc_4_310_02n0025
Ceiling Finishes
Central Vacuum Cleaning System
Vibration Isolation
Cleaning Requirements During Construction
Equipments Air Locks
Figure 5 Air Shower Velocity Versus Personnel Time in Shower
Color Treatment
Mechanical Systems - ufc_4_310_02n0033
Filter Installation
High Vacuum
Central Vacuum Cleaning Systems
Control Valves
Section 4: Acceptance Tests and Contamination Curves
Particle Size Distribution Curves
Figure 6 Particle Size Distribution Curves
Figure 7 Cleanliness Requirements Versus Particle Size Distribution Curves
Figure 8 Typical Particle Size
Table 1. Guidelines for Clean Room Classes
Section 5. Clean Room Designs
Advantages - ufc_4_310_02n0045
Downflow Clean rooms (Vertical Laminar Flow)
Figure 9 Plan View of a Conventional Clean Room Area With Clean Work Stations
Figure 10 Horizontal Laminar Airflow Paths
Figure 11 Vertical Laminar Airflow Paths
Figure 12 Vertical Flow Room With Basement
Figure 13 Vertical Flow Ceiling Unit
Figure 14 Vertical Laminar Flow
Design - ufc_4_310_02n0053
Specifications - ufc_4_310_02n0054
Design Requirements - ufc_4_310_02n0055
Upgrading of Existing Clean Rooms
Clean Work Stations
Tunnel Units
Figure 15 Built-in Clean Work Station
Figure 16 Horizontal Laminar Flow Bench
Figure 17 Vertical Laminar flow Bench
Figure 18 Laminar Flow Exhaust Hood
Figure 19 Movable Laminar Flow Clean Booth
Figure 20 Filter Bank Module
Bibliography - ufc_4_310_02n0065
References - ufc_4_310_02n0066
References - Cont'd - ufc_4_310_02n0067
References - Cont'd - ufc_4_310_02n0068
Glossary - ufc_4_310_02n0069
Glossary - Cont'd - ufc_4_310_02n0070
