TM 5-805-4/AFJMAN 32-1090
A
-
100 X Microscopes.
Note -
B
-
500 X Microscopes.
C
-
1,000 X Microscopes.
D
-
Electron Beam Mircoscopes to 0.3 micrometer geometries.
E
-
Anticipated Adequate for future low submicron geometries.
Figure 2-5. Vibration Criteria for Sensitive Equipment in Buildings.
2-8